These tables and figure are supplementary information to the article "Optimized ICP-MS Analysis of Elemental Impurities in Semiconductor-Grade Hydrochloric Acid."
These tables and figure are supplementary information to the article "Optimized ICP-MS Analysis of Elemental Impurities in Semiconductor-Grade Hydrochloric Acid," which was published in the September 2017 supplement issue Applications of ICP & ICP-MS Techniques for Today’s Spectroscopists to Spectroscopy (1).