This study investigates the applicability of a quadrupole-based ICP-MS fitted with a dynamic reaction cell (DRC) to analyze high-purity phosphoric and sulfuric acid used in the semiconductor industry. It compares the DRC approach with traditional ICP-MS background reduction techniques to compensate for phosphorus- and sulfur-based interferences and presents data that suggests that the DRC technology can reach the next generation of semiconductor purity levels for these chemicals.
Trending on Spectroscopy: The Top Content of 2024
December 30th 2024In 2024, we launched multiple content series, covered major conferences, presented two awards, and continued our monthly Analytically Speaking episodes. Below, you'll find a selection of the most popular content from Spectroscopy over the past year.