Coated Wafer Mapping Using UV-Vis Spectral Reflection and Transmission Measurements

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This Agilent application note discusses the Cary 7000 UMS, a system for mapping coated wafers using UV-Vis spectral reflection and transmission measurements. It introduces a new autosampler for automated, high-resolution mapping of large samples and demonstrates its utility with a zinc tin oxide layer on a sapphire substrate.

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