Takeshi Hasegawa

Multiple angle incidence resolution spectroscopy (MAIRS) has proven useful for characterization of the in-plane (IP) and out of plane (OP) vibrations of thin films on solid substrates. The MAIRS technique computes the IP and OP spectra by performing a regression analysis on a series of oblique-incidence transmission spectra collected over a range of angles of a single thin film sample mounted on a transparent substrate. MAIRS replaces the more traditional technique of the collection of a transmission spectrum of a thin film on a transparent substrate, followed by collection of a reflection absorption spectrum of the same film on a metallic substrate. Often times, preparation of the same thin film on different substrates with different chemical and physical properties can be problematic. This paper will discuss details of the electromagnetic theory of MAIRS, and demonstrate its use in producing the IP and OP spectra of several thin film samples.