William M. Geiger

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Central Computer Processors CPU concept. 3d rendering, conceptual image. | Image Credit: © Shuo - stock.adobe.com

GC-ICP-MS for Process and Quality Control in Semiconductor Manufacturing

William M. Geiger;Ed McCurdy;Mark Kelinske
September 1st 2023

Manufacturing advanced electronic devices requires the production of high-quality semiconductors and integrated circuit chips. In this article, the authors explain how GC, when coupled with ICP-MS, enables the detection of elements that are essential in semiconductor production.

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ICP-MS: A Universally Sensitive GC Detection Method for Specialty and Electronic Gas Analysis

Mark W. Raynor;William M. Geiger
February 1st 2009

The authors discuss the use of ICP-MS as an effective chromatographic detection method that is relatively easy to interface to gas chromatography for gas analysis.

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