Yanyan Chen

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Yanyan Chen is with Institute of Mechanics, Chinese Academy of Sciences, Beijing, China. He is also with Graduate School of the Chinese Academy of Sciences, Beijing, China.

Articles

$Refractive Index and Thickness Analysis of Natural Silicon Dioxide Film Growing on Silicon with Variable-Angle Spectroscopic Ellipsometry$

Refractive Index and Thickness Analysis of Natural Silicon Dioxide Film Growing on Silicon with Variable-Angle Spectroscopic Ellipsometry

Yanyan Chen;Gang Jin

October 1st 2006

October 2006. The authors investigate the optical properties and thickness of natural SiO2 thin films grown on silicon substrates simultaneously with a VASE system by choosing different angles of incidence and wavelength ranges.

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