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Automated detection of metals contamination in H2O2 & UPW
August 5th 2022This study describes an automated procedure to quantify ultratrace elemental impurities in de-ionized (DI) water and H2O2 using an Agilent 8900 ICP-QQQ fitted with an ESI prepFAST S automated sample introduction system. The prepFAST S automates sample preparation and calibration, saving time and minimizing the risk of sample-contamination from manual sample handling operations.
Automated Analysis of Trace Elemental Impurities in IPA
August 5th 2022This study demonstrates how to measure ultratrace (parts-per-trillion) levels of inorganic impurities in isopropyl alcohol, a key process chemical for semiconductor fabrication. The method includes online calibration using the IAS Automated Standard Addition System for an Agilent ICP-QQQ instrument. The method allows the accurate and reliable quantification of ultratrace level impurities in IPA without requiring a highly skilled analyst.